Ying Jian Chen
Research Center for Strategic Science and Technology Issues, Institute of Scientific and Technical Information of China, Beijing 100038
ABSTRACT
Demands for MEMS are continuously growing and it is predicted that they will continue to grow for a few more decades with the value of products rising to $40 billion in 2015 and $200 billion in 2025. In this study, we first discuss the main distinct advantages of MEMS as well as the important differences between MEMS and IC, then some latest research progresses on biomedical, optical and automotive applications of MEMS are reviewed. Finally, possible future developments of MEMS are prospected.
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How to cite this article
Ying Jian Chen, 2013. Distinct Advantages and New Applications in Mems. Information Technology Journal, 12: 4498-4502.
DOI: 10.3923/itj.2013.4498.4502
URL: https://scialert.net/abstract/?doi=itj.2013.4498.4502
DOI: 10.3923/itj.2013.4498.4502
URL: https://scialert.net/abstract/?doi=itj.2013.4498.4502