Zhipeng Wu
School of Astronautics, Harbin Institute of Technology, Harbin 150001, China
Xinglin Chen
School of Astronautics, Harbin Institute of Technology, Harbin 150001, China
PDF Fulltext XML References Citation
How to cite this article
Zhipeng Wu and Xinglin Chen, 2012. Synchronization Control for Reticle Stage and Wafer Stage Based on Iterative Learning Control. Information Technology Journal, 11: 492-495.
DOI: 10.3923/itj.2012.492.495
URL: https://scialert.net/abstract/?doi=itj.2012.492.495
DOI: 10.3923/itj.2012.492.495
URL: https://scialert.net/abstract/?doi=itj.2012.492.495